Design and Simulation of Two Axis MEMS Scanner for LIDAR Applications

Abstract

The MEMS design is promising feature for the future innovations. The main approach for using MEMS is that size reduction, cost reduction. MEMS technology is also involved in biomedical imaging, microscopy, LiDAR for unmanned vehicles using mirrors and proper actuating mechanisms. In this paper, a low voltage driven scanning mirror is proposed considering the applications such as LiDAR especially for UAV’s (Unmanned Aerial Vehicle) and Gesture Recognition. The scanning mirror should achieve a decent FOV (Field Of View) and Low Power Consumption is achieved by leverage structure with suitable materials like PZT ceramics. Proper Actuating mechanisms are implemented to obtain large FOV and two axis scanning in MEMS based mirror.